Parts For Sale TEGAL 42-323-001 TEGAL 42-323-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-323-001 Manufacturer TEGAL Part Number 42-323-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 47-339-005 52-050-001 42-852-001 40-295-003 FOCUS RING 44-960-001 52-041-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02 47-445-001