Parts For Sale TEGAL 42-286-002 TEGAL 42-286-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-286-002 Manufacturer TEGAL Part Number 42-286-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-768-006 Insulator Ring 40-481-002 Insulator Ring 47-155-001 40-374-006 46-787-002 46-912-002 47-639-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.