Parts For Sale TEGAL 42-286-002 TEGAL 42-286-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-286-002 Manufacturer TEGAL Part Number 42-286-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 37-411-001 42-899-001 44-888-001 51-228-001 42-323-001 99-287-003 SHUTTLE INTERFACE BOARD 39-741-009 Tegal 903e lower electrode 46-1014-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 150 mm 150 mm 25 slot Aluminum wafer carrier.