Parts For Sale TEGAL 42-286-002 TEGAL 42-286-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-286-002 Manufacturer TEGAL Part Number 42-286-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 52-058-002 99-247-003 SPATULA INTERFACE 80-195-450 47-006-002 47-161-001 42-456-003 44-203-005 39-735-004 Tegal 903e lower electrode 44-671-001 150 mm 150 mm 25 slot Aluminum wafer carrier.