Parts For Sale TEGAL 42-261-001 TEGAL 42-261-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-261-001 Manufacturer TEGAL Part Number 42-261-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 47-158-002 80-650-053 ACTUATOR 42-508-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 43-014-001 44-634-001 44-261-002 46-925-001 150 mm 150 mm 25 slot Aluminum wafer carrier.