Parts For Sale TEGAL 42-213-003 TEGAL 42-213-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-213-003 Manufacturer TEGAL Part Number 42-213-003 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 47-158-002 42-508-001 40-395-001 RING, FLAT 6 43-014-001 44-261-002 46-925-001 44-960-001 150 mm 150 mm 25 slot Aluminum wafer carrier.