Parts For Sale TEGAL 42-213-002 TEGAL 42-213-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-213-002 Manufacturer TEGAL Part Number 42-213-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 39-741-004 ELECTRODE, LOWER 6" 42-667-001 44-607-003 44-519-001 44-421-001 99-287-003 SHUTTLE INTERFACE BOARD 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 46-774-001 44-957-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL