Parts For Sale TEGAL 42-163-001 TEGAL 42-163-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-163-001 Manufacturer TEGAL Part Number 42-163-001 Description Status Available Approx. Qty 31 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 31.0 US Other TEGAL Parts 58-073-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 83-259-001 40-467-001 40-140-001 RING, CERAMIC INSULATOR 42-362-001 47-101-002 39-894-001 99-249-002 PCB TEGAL END POINT DETECTOR 52-047-002