Parts For Sale TEGAL 42-138-002 TEGAL 42-138-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-138-002 Manufacturer TEGAL Part Number 42-138-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 46-437-002 39-741-004 ELECTRODE, LOWER 6" 52-058-002 99-247-003 SPATULA INTERFACE 93-229-005 RF CABLE 901E 51-191-001 46-735-002 83-259-001 50-022-001 52-059-001 83-288-001 150 mm 150 mm 25 slot Aluminum wafer carrier.