Parts For Sale TEGAL 42-138-002 TEGAL 42-138-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-138-002 Manufacturer TEGAL Part Number 42-138-002 Description Status Available Approx. Qty 2 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 2.0 US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-006-002 47-161-001 40-295-003 FOCUS RING 42-456-003 44-203-005 42-180-001/002 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%