Parts For Sale TEGAL 42-1031-001 TEGAL 42-1031-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-1031-001 Manufacturer TEGAL Part Number 42-1031-001 Description Status Available Approx. Qty 15 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 15.0 US Other TEGAL Parts 40-467-001 47-339-005 42-362-001 47-101-002 39-894-001 93-123-006 BELT 80-202-297 BELT 1/4W 115GRV 80-202-297 A4T1 PAD ETCHER TEGAL 903E 52-047-002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 150 mm 150 mm 25 slot Aluminum wafer carrier.