Parts For Sale TEGAL 42-1029-001 TEGAL 42-1029-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 42-1029-001 Manufacturer TEGAL Part Number 42-1029-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 46-776-003 42-899-001 44-888-001 42-323-001 39-741-009 Tegal 903e lower electrode 46-272-003 40-576-003-C Ring Ceramic Focus Castellated 44-439-001