Parts For Sale TEGAL 41-522-001 TEGAL 41-522-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-522-001 Manufacturer TEGAL Part Number 41-522-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 42-1007-001 38-023-001 COOLING RING 37-411-001 42-899-001 44-888-001 51-228-001 46-1014-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E