Parts For Sale TEGAL 41-521-001 TEGAL 41-521-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-521-001 Manufacturer TEGAL Part Number 41-521-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-195-450 47-006-002 47-161-001 40-295-003 FOCUS RING 42-456-003 40-260-001 WINDOW, SAPPHIRE 1x2.5 44-203-005 42-180-001/002 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.