Parts For Sale TEGAL 41-478-001 TEGAL 41-478-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-478-001 Manufacturer TEGAL Part Number 41-478-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 47-155-001 93-229-005 RF CABLE 901E 40-374-006 46-787-002 46-912-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-639-001 47-080-003 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.