Parts For Sale TEGAL 41-416-001 TEGAL 41-416-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-416-001 Manufacturer TEGAL Part Number 41-416-001 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 42-1007-001 46-776-003 38-023-001 COOLING RING 42-899-001 44-888-001 42-323-001 46-272-003 99-249-002 PCB TEGAL END POINT DETECTOR 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02