Parts For Sale TEGAL 41-351-002 TEGAL 41-351-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-351-002 Manufacturer TEGAL Part Number 41-351-002 Description Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 4.0 US Other TEGAL Parts 46-879-001 44-735-002 47-473-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-707-001 46-670-003 46-462-001 150 mm 150 mm 25 slot Aluminum wafer carrier. 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL