Parts For Sale TEGAL 41-331-002 TEGAL 41-331-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-331-002 Manufacturer TEGAL Part Number 41-331-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-437-002 46-994-002 80-650-053 ACTUATOR 47-526-001 46-735-002 51-191-001 47-672-001 99-287-003 SHUTTLE INTERFACE BOARD 40-576-003-C Ring Ceramic Focus Castellated 39-735-004 Tegal 903e lower electrode