Parts For Sale TEGAL 41-326-003 TEGAL 41-326-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-326-003 Manufacturer TEGAL Part Number 41-326-003 Description Status Available Approx. Qty 29 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 29.0 US Other TEGAL Parts 46-879-001 40-395-001 RING, FLAT 6 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 44-888-001 42-683-001 39-956-001 42-960-003 40-295-003 FOCUS RING 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 44-957-001 37-222-002 Cooling Plate