Parts For Sale TEGAL 41-326-003 TEGAL 41-326-003 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-326-003 Manufacturer TEGAL Part Number 41-326-003 Description Status Available Approx. Qty 29 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 29.0 US Other TEGAL Parts 46-879-001 39-680-003 ELECTRODE, CONEHEAD VENTED 44-757-001 47-583-001 47-695-001 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 41-362-002 50-056-001 150 mm 150 mm 25 slot Aluminum wafer carrier.