Parts For Sale TEGAL 41-311-002 TEGAL 41-311-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-311-002 Manufacturer TEGAL Part Number 41-311-002 Description Status Available Approx. Qty 6 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 6.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 99-247-003 SPATULA INTERFACE 42-508-001 41-351-003 43-014-001 44-261-002 40-295-003 FOCUS RING 44-960-001 40-576-003-C Ring Ceramic Focus Castellated 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 47-445-001