Parts For Sale TEGAL 41-161-001 TEGAL 41-161-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 41-161-001 Manufacturer TEGAL Part Number 41-161-001 Description Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 40-768-004 Insulator Ring 39-853-005 40-395-002 Ring Ceramic 125C Castellated 42-426-001 47-339-005 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-852-001 52-041-001 58-046-001