Parts For Sale TEGAL 40-803-001 TEGAL 40-803-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-803-001 Manufacturer TEGAL Part Number 40-803-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-004 Insulator Ring 58-053-001 80-195-450 51-056-001 42-826-005 00-0917-2 5" GUIDE RING #G00-0917-2 40-159-001 ROD SAPPHIRE .25DIA STRAIGHT 40-295-003 FOCUS RING 51-178-001 99-249-002 PCB TEGAL END POINT DETECTOR 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02