Parts For Sale TEGAL 40-666-001 TEGAL 40-666-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-666-001 Manufacturer TEGAL Part Number 40-666-001 Description Status Available Approx. Qty 23 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 23.0 US Other TEGAL Parts 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL 58-073-001 37-221-002 UPPER ELECT ANOD, NON ANODIZED 52-058-002 39-680-003 ELECTRODE, CONEHEAD VENTED 40-467-001 42-362-001 47-101-002 39-894-001 52-047-002 50-056-001