Parts For Sale TEGAL 40-606-010-3 TEGAL 40-606-010-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-606-010-3 Manufacturer TEGAL Part Number 40-606-010-3 Description QUARTZ LINER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 JP Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 80-195-450 80-1025-01 HEATER 42-456-003 39-741-009 Tegal 903e lower electrode 42-180-001/002 40-576-003-C Ring Ceramic Focus Castellated 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-533-001 37-668-001
