Parts For Sale TEGAL 40-606-010-3 TEGAL 40-606-010-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-606-010-3 Manufacturer TEGAL Part Number 40-606-010-3 Description QUARTZ LINER Status Available Approx. Qty 4 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 4.0 JP Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 47-155-001 46-787-002 39-563-001 39-741-026 Tegal 903e lower electrode 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 47-080-003 41-271-002 40-260-001 WINDOW, SAPPHIRE 1x2.5 15394-2 Spacer