Parts For Sale TEGAL 40-567-001 TEGAL 40-567-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-567-001 Manufacturer TEGAL Part Number 40-567-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 42-667-001 51-267-001 80-650-053 ACTUATOR 44-607-003 44-421-001 40-295-003 FOCUS RING 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 41-103-008 44-957-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE