Parts For Sale TEGAL 40-567-001 TEGAL 40-567-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-567-001 Manufacturer TEGAL Part Number 40-567-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 41-113-001 80-195-450 47-006-002 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 42-456-003 39-741-009 Tegal 903e lower electrode 40-260-001 WINDOW, SAPPHIRE 1x2.5 42-180-001/002