Parts For Sale TEGAL 40-319-002 TEGAL 40-319-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-319-002 Manufacturer TEGAL Part Number 40-319-002 Description Status Available Approx. Qty 7 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 7.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 41-113-001 80-195-450 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-006-002 47-161-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 40-295-003 FOCUS RING 39-733-004 Tegal 903e lower electrode 42-456-003 42-180-001/002