Parts For Sale TEGAL 40-178-001 TEGAL 40-178-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-178-001 Manufacturer TEGAL Part Number 40-178-001 Description Status Available Approx. Qty 25 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 25.0 US Other TEGAL Parts 46-879-001 33-349-004 ELECTRODE, CONDEHEAD UPPER 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 99-247-003 SPATULA INTERFACE 93-229-005 RF CABLE 901E 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 44-888-001 42-683-001 39-956-001 42-960-003 39-733-004 Tegal 903e lower electrode 44-957-001