Parts For Sale TEGAL 40-159-002 TEGAL 40-159-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-159-002 Manufacturer TEGAL Part Number 40-159-002 Description ROD, SAPHIRE Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 46-1006-001 37-180-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-741-026 Tegal 903e lower electrode 39-741-010 Tegal 903e lower electrode 39-733-004 Tegal 903e lower electrode 32-301-001 40-790-001 FOCUS RING 39-735-008 ELECTRODE, LOWER ANODIZED 6" 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE
