Parts For Sale TEGAL 40-144-002 TEGAL 40-144-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-144-002 Manufacturer TEGAL Part Number 40-144-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 40-481-002 Insulator Ring 51-191-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-140-001 RING, CERAMIC INSULATOR 52-050-001 99-287-003 SHUTTLE INTERFACE BOARD 46-1000-001 52-167-001 58-046-001