Parts For Sale TEGAL 40-1009-851 TEGAL 40-1009-851 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 40-1009-851 Manufacturer TEGAL Part Number 40-1009-851 Description Ring, JEIDA Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 1.0 US Other TEGAL Parts 80-650-053 ACTUATOR 37-411-001 41-395-001 99-287-003 SHUTTLE INTERFACE BOARD 93-123-006 BELT 32-260-001 46-1014-002 32-356-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 32-139-002 150 mm 150 mm 25 slot Aluminum wafer carrier.