Parts For Sale TEGAL 39-861-002 TEGAL 39-861-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-861-002 Manufacturer TEGAL Part Number 39-861-002 Description Status Available Approx. Qty 20 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 20.0 US Other TEGAL Parts 46-879-001 83-259-001 44-888-001 42-683-001 39-956-001 42-960-003 37-221-003 UPPER ELECT ANOD., .021 HOLE RAD. HOLE 44-957-001 40-576-003-C Ring Ceramic Focus Castellated 40-304-001 ELECTRODE, INSULATOR LOWER 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02