Parts For Sale TEGAL 39-854-002 TEGAL 39-854-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-854-002 Manufacturer TEGAL Part Number 39-854-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 40-395-002 Ring Ceramic 125C Castellated 40-481-002 Insulator Ring 93-229-005 RF CABLE 901E 46-810-001 74-101-001 40-467-001 39-894-001 39-956-001 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 150 mm 150 mm 25 slot Aluminum wafer carrier.
