Parts For Sale TEGAL 39-854-002 TEGAL 39-854-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-854-002 Manufacturer TEGAL Part Number 39-854-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-853-005 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 31-406-003 WAFER SENSOR ASSY-VCE 40-419-001 80-650-053 ACTUATOR 46-810-001 40-467-001 46-1000-001 39-894-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 46-922-001
