Parts For Sale TEGAL 39-854-002 TEGAL 39-854-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-854-002 Manufacturer TEGAL Part Number 39-854-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-404-001 40-768-006 Insulator Ring 99-247-003 SPATULA INTERFACE CR1008-00104 51-250-001 39-756-003 52-050-001 CR1144-00103 CR1144-00103 39-741-009 Tegal 903e lower electrode 80-200-001