Parts For Sale TEGAL 39-815-002 TEGAL 39-815-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-815-002 Manufacturer TEGAL Part Number 39-815-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-251-001 51-092-001 31-406-003 WAFER SENSOR ASSY-VCE 40-772-001 51-270-002 CR1144-00103 CR1144-00103 51-263-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%