Parts For Sale TEGAL 39-660-001 TEGAL 39-660-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-660-001 Manufacturer TEGAL Part Number 39-660-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 31-406-003 WAFER SENSOR ASSY-VCE 46-810-001 74-101-001 40-467-001 39-741-026 Tegal 903e lower electrode 39-894-001 39-956-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-304-001 ELECTRODE, INSULATOR LOWER 39-735-004 Tegal 903e lower electrode