Parts For Sale TEGAL 39-563-001 TEGAL 39-563-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-563-001 Manufacturer TEGAL Part Number 39-563-001 Description Status Available Approx. Qty 26 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 26.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-879-001 39-680-003 ELECTRODE, CONEHEAD VENTED 80-650-053 ACTUATOR 93-229-005 RF CABLE 901E 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.