Parts For Sale TEGAL 39-522-002 TEGAL 39-522-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-522-002 Manufacturer TEGAL Part Number 39-522-002 Description Status Available Approx. Qty 19 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 19.0 US Other TEGAL Parts 46-879-001 39-741-004 ELECTRODE, LOWER 6" 33-349-004 ELECTRODE, CONDEHEAD UPPER 31-406-003 WAFER SENSOR ASSY-VCE 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.