Parts For Sale TEGAL 39-522-002 TEGAL 39-522-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-522-002 Manufacturer TEGAL Part Number 39-522-002 Description Status Available Approx. Qty 19 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 19.0 US Other TEGAL Parts 58-073-001 31-406-003 WAFER SENSOR ASSY-VCE 40-467-001 42-362-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 47-101-002 39-894-001 52-047-002 80-202-357 O-Ring 40-140-003 RING, INSULATOR, CERAMIC .20-99.5% 55-008-001 BELT SPAT