Parts For Sale TEGAL 39-184-002 TEGAL 39-184-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-184-002 Manufacturer TEGAL Part Number 39-184-002 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-004 Insulator Ring 39-741-004 ELECTRODE, LOWER 6" 39-680-003 ELECTRODE, CONEHEAD VENTED 51-259-003 52-050-001 46-1000-001 39-733-004 Tegal 903e lower electrode 52-167-001 39-797-001 58-046-001