Parts For Sale TEGAL 39-165-002 TEGAL 39-165-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-165-002 Manufacturer TEGAL Part Number 39-165-002 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 46-879-001 44-757-001 47-583-001 99-287-003 SHUTTLE INTERFACE BOARD 47-695-001 41-362-002 50-056-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD.