Parts For Sale TEGAL 39-165-002 TEGAL 39-165-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-165-002 Manufacturer TEGAL Part Number 39-165-002 Description Status Available Approx. Qty 9 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 9.0 US Other TEGAL Parts 47-158-002 39-861-002 99-247-003 SPATULA INTERFACE 42-508-001 41-351-003 43-014-001 40-295-003 FOCUS RING 46-925-001 80-200-053 CLAMP,HOSE,WORM DR,2 1/4,SST 150 mm 150 mm 25 slot Aluminum wafer carrier.