Parts For Sale TEGAL 39-152-005 TEGAL 39-152-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-152-005 Manufacturer TEGAL Part Number 39-152-005 Description CUP PL 5" Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 46-879-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 47-583-001 99-287-003 SHUTTLE INTERFACE BOARD 47-695-001 41-362-002 32-415-002 50-056-001 55-008-001 BELT SPAT