Parts For Sale TEGAL 39-152-005 TEGAL 39-152-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-152-005 Manufacturer TEGAL Part Number 39-152-005 Description CUP PL 5" Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 83-259-001 80-195-450 80-1025-01 HEATER 39-741-026 Tegal 903e lower electrode 42-456-003 39-741-009 Tegal 903e lower electrode 42-180-001/002 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 39-533-001 37-668-001
