Parts For Sale TEGAL 39-152-005 TEGAL 39-152-005 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-152-005 Manufacturer TEGAL Part Number 39-152-005 Description CUP PL 5" Status Available Approx. Qty 1 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New 1.0 US Other TEGAL Parts 29-345-021 KIT, CONS-STARTUP, HRE 1.1 52-058-002 39-680-003 ELECTRODE, CONEHEAD VENTED 38-023-001 COOLING RING 37-180-001 23-193-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 44-888-001 32-301-001 99-249-002 PCB TEGAL END POINT DETECTOR 44-957-001