Parts For Sale TEGAL 39-140-002 TEGAL 39-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-140-002 Manufacturer TEGAL Part Number 39-140-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 37-221-002 UPPER ELECT ANOD, NON ANODIZED 39-861-002 42-508-001 41-351-003 39-741-026 Tegal 903e lower electrode 43-014-001 44-261-002 40-295-003 FOCUS RING 39-605-001 40-140-003 RING, INSULATOR, CERAMIC .20-99.5%