Parts For Sale TEGAL 39-140-002 TEGAL 39-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-140-002 Manufacturer TEGAL Part Number 39-140-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 47-639-001 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 40-768-006 Insulator Ring 47-080-003 41-271-002 99-247-003 SPATULA INTERFACE 39-680-003 ELECTRODE, CONEHEAD VENTED 47-155-001 46-787-002 37-221-001 UPPER ELECT, .014 HOLE NO RAD. 39-818-001 SLEEVE,FIBER OPTIC #39-818-001 A4T1 PAD ETCHER TEGAL 903E 39-563-001