Parts For Sale TEGAL 39-140-002 TEGAL 39-140-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 39-140-002 Manufacturer TEGAL Part Number 39-140-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 46-879-001 39-741-004 ELECTRODE, LOWER 6" 40-768-006 Insulator Ring 46-1006-001 93-229-005 RF CABLE 901E 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001 200 ASHER, TEGAL PLASMALINE 200 8.5X7D METAL CHAMBER 5-8-02