Parts For Sale TEGAL 37-983-001 TEGAL 37-983-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-983-001 Manufacturer TEGAL Part Number 37-983-001 Description Status Available Approx. Qty 8 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 8.0 US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 39-861-002 31-406-003 WAFER SENSOR ASSY-VCE 42-508-001 41-351-003 43-014-001 44-261-002 40-576-003-C Ring Ceramic Focus Castellated 39-605-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 55-008-001 BELT SPAT