Parts For Sale TEGAL 37-820-001 TEGAL 37-820-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-820-001 Manufacturer TEGAL Part Number 37-820-001 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 52-050-001 46-1000-001 52-167-001 39-797-001 58-046-001 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 80-200-121 BEARING DOOR T915 TEGAL CORPORATION