Parts For Sale TEGAL 37-669-001 TEGAL 37-669-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-669-001 Manufacturer TEGAL Part Number 37-669-001 Description Status Available Approx. Qty 5 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 5.0 US Other TEGAL Parts 31-406-003 WAFER SENSOR ASSY-VCE 42-426-001 40-140-001 RING, CERAMIC INSULATOR 47-339-005 52-050-001 42-852-001 52-041-001 80-202-357 O-Ring 39-750-001 39-680-005 ELECTRODE, UPPER VENTED HARD ANOD. 55-008-001 BELT SPAT