Parts For Sale TEGAL 37-586-002-3 TEGAL 37-586-002-3 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-586-002-3 Manufacturer TEGAL Part Number 37-586-002-3 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 39-680-003 ELECTRODE, CONEHEAD VENTED 38-023-001 COOLING RING 46-810-001 74-101-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-956-001 99-249-002 PCB TEGAL END POINT DETECTOR 40-304-001 ELECTRODE, INSULATOR LOWER