Parts For Sale TEGAL 37-561-002 TEGAL 37-561-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-561-002 Manufacturer TEGAL Part Number 37-561-002 Description Status Available Approx. Qty 3 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 3.0 US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 42-508-001 41-351-003 43-014-001 44-261-002 44-960-001 39-733-004 Tegal 903e lower electrode 39-605-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL