Parts For Sale TEGAL 37-526-003A TEGAL 37-526-003A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-526-003A Manufacturer TEGAL Part Number 37-526-003A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-003 RING 4" CASTELLATED W/ FLAT CUTAWAY 46-180-001 46-1006-001 51-191-001 46-786-001 46-787-002 99-287-003 SHUTTLE INTERFACE BOARD 39-733-004 Tegal 903e lower electrode 40-260-001 WINDOW, SAPPHIRE 1x2.5 39-665-001 83-288-001