Parts For Sale TEGAL 37-517-001 TEGAL 37-517-001 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-517-001 Manufacturer TEGAL Part Number 37-517-001 Description Status Available Approx. Qty 75 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 75.0 US Other TEGAL Parts 150 mm 150 mm 25 slot Aluminum wafer carrier. 46-879-001 40-395-002 Ring Ceramic 125C Castellated 39-741-004 ELECTRODE, LOWER 6" 44-888-001 42-683-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 39-956-001 42-960-003 44-957-001 40-304-001 ELECTRODE, INSULATOR LOWER