Parts For Sale TEGAL 37-384-001A TEGAL 37-384-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-384-001A Manufacturer TEGAL Part Number 37-384-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 38-023-001 COOLING RING 39-756-003 46-810-001 74-101-001 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 40-467-001 39-894-001 39-956-001 39-741-009 Tegal 903e lower electrode