Parts For Sale TEGAL 37-227-001A TEGAL 37-227-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-227-001A Manufacturer TEGAL Part Number 37-227-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-768-004 Insulator Ring 39-853-005 31-406-003 WAFER SENSOR ASSY-VCE 51-259-003 40-395-001 RING, FLAT 6 52-050-001 29-464-001 SPR, TEGAL KIT CHMBR GRND OEM PN equiv: 29-464-001 46-1000-001 52-167-001 40-260-001 WINDOW, SAPPHIRE 1x2.5 58-046-001 37-471-001A