Parts For Sale TEGAL 37-169-005-2 TEGAL 37-169-005-2 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-169-005-2 Manufacturer TEGAL Part Number 37-169-005-2 Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 39-741-004 ELECTRODE, LOWER 6" 51-259-003 52-050-001 46-1000-001 52-167-001 99-249-002 PCB TEGAL END POINT DETECTOR 58-046-001 41-399-001 Tegal Part # 41-399-001 Rev.A Gasket, RF-90XE 37-471-001A