Parts For Sale TEGAL 37-164-001A TEGAL 37-164-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-164-001A Manufacturer TEGAL Part Number 37-164-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 40-395-002 Ring Ceramic 125C Castellated 51-259-003 33-085-002 BELLOW,LWR ELCTD #33-085-002 A4T1 PAD ETCHER TEGAL 903E 52-050-001 46-1000-001 39-741-009 Tegal 903e lower electrode 52-167-001 40-790-001 FOCUS RING 58-046-001 37-471-001A