Parts For Sale TEGAL 37-164-001A TEGAL 37-164-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-164-001A Manufacturer TEGAL Part Number 37-164-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 33-349-004 ELECTRODE, CONDEHEAD UPPER 46-177-001 39-680-003 ELECTRODE, CONEHEAD VENTED 37-223-008 80-650-053 ACTUATOR 40-260-001 WINDOW, SAPPHIRE 1x2.5 40-374-006 46-787-002 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 50-079-002 83-288-001
