Parts For Sale TEGAL 37-164-001A TEGAL 37-164-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-164-001A Manufacturer TEGAL Part Number 37-164-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 51-251-001 51-092-001 56-006-001 46-787-003 51-259-001 93-123-006 BELT 39-741-009 Tegal 903e lower electrode 40-790-001 FOCUS RING 31-388-001 CONNECTER RF CONN ASSY 31-388-001 A4T1 PAD ETCHER TEGAL 903E 52-175-001
