Parts For Sale TEGAL 37-164-001A TEGAL 37-164-001A Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-164-001A Manufacturer TEGAL Part Number 37-164-001A Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 58-073-001 40-768-006 Insulator Ring 37-383-004 31-406-003 WAFER SENSOR ASSY-VCE 46-810-001 40-467-001 39-894-001 99-287-003 SHUTTLE INTERFACE BOARD 39-832-001 37-222-002 Cooling Plate 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
