Parts For Sale TEGAL 37-161-002 TEGAL 37-161-002 Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-161-002 Manufacturer TEGAL Part Number 37-161-002 Description Status Available Approx. Qty 52 Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country Second Source (New) 52.0 US Other TEGAL Parts 52-058-002 31-406-003 WAFER SENSOR ASSY-VCE 38-023-001 COOLING RING 37-180-001 44-888-001 42-683-001 39-956-001 42-960-003 44-957-001 80-200-144 BSHG BALL 3/8B 5/8OD 7/8L STL
