Parts For Sale TEGAL 37-047-002B TEGAL 37-047-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-047-002B Manufacturer TEGAL Part Number 37-047-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 52-058-002 37-383-004 46-810-001 40-467-001 80-095-057 PROBE TEMPERATURE 3/160D 4L SST OPM: ANALOG DEVICES P/N ... 39-894-001 39-832-001 40-790-001 FOCUS RING 46-922-001 150 mm 150 mm 25 slot Aluminum wafer carrier.