Parts For Sale TEGAL 37-047-002B TEGAL 37-047-002B Request Quote Do not fill in this field Request for Quote First Name: * Last Name: * Email: * Confirm Email: * Company: Quantity: Message: Conditions:NewUsedRefurbishedNeeds RepairSecond Source (New)Second Source (Used) Part Details TEGAL 37-047-002B Manufacturer TEGAL Part Number 37-047-002B Description Status Available Approx. Qty Unknown Pricing Submit RFQ to Get Prices Most Recent Supplier Data Condition Quantity Country New – US Other TEGAL Parts 161-0040K VALVE, INLINE VACUUM 51-251-001 51-092-001 56-006-001 46-787-003 99-138-004 PRINTED CIRCUIT BOARD TEGAL 99-138-004 TEMP MONITOR PCB 39-741-026 Tegal 903e lower electrode 51-259-001 40-576-003-C Ring Ceramic Focus Castellated 52-175-001